Features
● Using a microelectromechanical system (MEMS) flow sensor chip , a bypass shunt, and an electromagnetic proportional valve.
● Electromagnetic proportional valves are characterized by long service life and high sensitivity .
● Zero-point stability of the sensor.
● It has high accuracy and good repeatability within its measurement range .
● Fast response time.
● Standard mechanical interface, easy to install .
● RS485 communication output, standard MODBUS RTU protocol .
● The LCD displays instantaneous and cumulative flow rates, providing a clear and intuitive reading experience . Flow rates can be controlled via button input, and the controlled and real-time flow rates are directly displayed on the LCD screen.
● Standard configuration includes 4-20mA input/output control .
● Customizable 0-5V or 0-10V input/output control
Product Introduction
The AI-FC proportional valve controlled thermal gas mass flow meter is a thermal gas flow sensor with proportional valve flow control designed and developed using an advanced microelectromechanical system (MEMS) flow sensing chip. It combines digital signal processing technology and flow control algorithms to achieve precise control and intelligent processing of the flow rate of various gases .
Proportional valve-controlled flow meters are characterized by high accuracy and strong anti-interference capabilities. The bypass fluid in the distributor is in a laminar flow state, which makes the measurement and control more stable and accurate, making it suitable for the measurement and process control of various small-flow clean gases.
Technical parameters
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working power supply
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DC24V/12W
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Accuracy (%)
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Control accuracy: ±1.0% SP, Measurement accuracy: 1% fs
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Control and measurement range ratio
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1:100
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Valve type
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Normally closed type
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Operating temperature
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-10~55℃
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humidity
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<95%RH (no frost, no ice, no condensation)
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Flow Specifications
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(0~10, 20, 30, 50, 100, 200, 300, 500) SCCM
(0~1, 2, 3, 5, 10, 20, 30)SLM
(0~50, 100) SLM
(0-200, 300) SLM
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Working pressure range
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Measurement: 0-1.5MPa
Control: 10SCCM-30SPLM Pressure: 0.1-1.0MPa
100 SPLM pressure: 0.1-0.65 MPa
300SPLM Pressure: 0.1-0.5MPa
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Typical control response time
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Less than 1.5 seconds (T90)
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Measure response time
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<50ms
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Output method
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4-20mA (1-5V), 0-5V and 0-10V can be customized.
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Communication methods
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RS485 (Modbus RS485 protocol )
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Control method
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Button operation, Modbus, 4-20mA (1-5V), 0-5V and 0-10V can be customized.
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Mechanical connection
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G1/4, PT1/2 internal threads; other threads can be customized.
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Protection level
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IP40
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were measured at 25 ℃, 101.32 kPa, and in dry air .
Other features
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Selectable standard temperature conditions
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0°, 20°, 25°, adjustable by the user, default is 25°
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Selectable gas type
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Air, N2, O2, CH4, Ar, CO2, He, H2 , C3H8
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Normal operating pressure difference
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0.1-0.8 MPa, flow rate <= 30 SLM
0.1MPA-0.6MPA 30SLM < Flow Rate Specification <= 100SLM
0.1MPa -0.4MPa 100SLM < Flow Specification < 300SLM
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Unconventional working pressure difference
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Customized consultation available
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